FABRICATION OF MWCNT BASED GAS SENSOR USING SITE-SELECTIVE GROWTH OF NANOTUBES ON GOLD PATTERNED SILICON OXIDE SUBSTRATE

Author

Srikanth Durgamahanty, University of KentuckyFollow

Date Available

6-6-2011

Year of Publication

2011

Degree Name

Master of Science in Electrical Engineering (MSEE)

Document Type

Thesis

College

Engineering

Department

Electrical Engineering

First Advisor

Dr. Vijay P Singh

Abstract

Growth confinement techniques for multi walled carbon nanotubes on Au/SiO₂ surfaces was studied and incorporated into a gas sensor design. A device framework was conceived and a sensor was built to achieve this structure. The fabrication results were analyzed using scanning electron microscopy which confirmed the achievement of highly site-selective growth of carbon nanotubes, exclusively between the interdigitated electrodes. The sensor was then evaluated for its capacitance and conductance response when exposed to NO₂ gas. Variation in sensitivities with frequency and flow rate were analyzed. A mathematical model was derived for such a device structure and the predictions of the model were compared with experimental results.

Recommended Citation

Durgamahanty, Srikanth, "FABRICATION OF MWCNT BASED GAS SENSOR USING SITE-SELECTIVE GROWTH OF NANOTUBES ON GOLD PATTERNED SILICON OXIDE SUBSTRATE" (2011). University of Kentucky Master's Theses. 99.
https://uknowledge.uky.edu/gradschool_theses/99