Archived
This content is available here strictly for research, reference, and/or recordkeeping and as such it may not be fully accessible. If you work or study at University of Kentucky and would like to request an accessible version, please use the SensusAccess Document Converter.
Date Available
12-14-2011
Year of Publication
2006
Document Type
Dissertation
College
Engineering
Department/School/Program
Mechanical Engineering
Faculty
M. Pinar Mengüç
Faculty
R. Ryan Vallance
Abstract
Nano-manufacturing is receiving significant attention in industry due to the ever-growing interest in nanotechnology in research institutions. It is hypothesized that single-step or direct-write nano-scale machining might be achieved by coupling nano-probe field emission with radiation transfer. A laser may be used to heat a workpiece within a microscopic region that encloses an even smaller nanoscopic region subjected to a focused electron beam. The electron-beam supplies marginal heat sufficient to remove a minute volume of material by evaporation or sublimation. Experimentally investigating this hypothesis requires an estimate of the power needed in the electron-beam. To this end, a detailed numerical study is conducted to study the possibility of using the nano-probe field emission for nano-machining. The modeling effort in this case is divided into two parts. The first part deals with the electron-beam propagation inside a target workpiece. The second part considers the temperature increase due to the energy transfer between the electron-beam and the workpiece itself. A Monte Carlo/Ray Tracing technique is used in modeling the electron-beam propagation. This approach is identical to that of a typical Monte Carlo simulation in radiative transfer, except that proper electron scattering properties are employed. The temperature distribution inside a gold film is predicted using the heat conduction equations. Details of the various numerical models employed in the simulation and a series of representative results will be presented in this dissertation.
Recommended Citation
Wong, Basil T., "THERMAL HEAT TRANSPORT AT THE NANO-SCALE LEVEL AND ITS APPLICATION TO NANO-MACHINING" (2006). University of Kentucky Doctoral Dissertations. 387.
https://uknowledge.uky.edu/gradschool_diss/387
