Date Available
12-14-2011
Year of Publication
2006
Document Type
Dissertation
College
Engineering
Department
Mechanical Engineering
First Advisor
M. Pinar Mengüç
Second Advisor
R. Ryan Vallance
Abstract
Nano-manufacturing is receiving significant attention in industry due to the ever-growing interest in nanotechnology in research institutions. It is hypothesized that single-step or direct-write nano-scale machining might be achieved by coupling nano-probe field emission with radiation transfer. A laser may be used to heat a workpiece within a microscopic region that encloses an even smaller nanoscopic region subjected to a focused electron beam. The electron-beam supplies marginal heat sufficient to remove a minute volume of material by evaporation or sublimation. Experimentally investigating this hypothesis requires an estimate of the power needed in the electron-beam. To this end, a detailed numerical study is conducted to study the possibility of using the nano-probe field emission for nano-machining. The modeling effort in this case is divided into two parts. The first part deals with the electron-beam propagation inside a target workpiece. The second part considers the temperature increase due to the energy transfer between the electron-beam and the workpiece itself. A Monte Carlo/Ray Tracing technique is used in modeling the electron-beam propagation. This approach is identical to that of a typical Monte Carlo simulation in radiative transfer, except that proper electron scattering properties are employed. The temperature distribution inside a gold film is predicted using the heat conduction equations. Details of the various numerical models employed in the simulation and a series of representative results will be presented in this dissertation.
Recommended Citation
Wong, Basil T., "THERMAL HEAT TRANSPORT AT THE NANO-SCALE LEVEL AND ITS APPLICATION TO NANO-MACHINING" (2006). University of Kentucky Doctoral Dissertations. 387.
https://uknowledge.uky.edu/gradschool_diss/387
