Year of Publication

2020

Degree Name

Master of Science in Mechanical Engineering (MSME)

Document Type

Master's Thesis

College

Engineering

Department/School/Program

Mechanical Engineering

First Advisor

Dr. Christine Ann Trinkle

Abstract

This thesis describes a procedure for fabricating arrays of microstructures out of SU-8 photoresist and nickel, which was developed with the goal of yielding microrobots capable of 1D rotation byway of magnetically-induced beam vibration that could be used for non-commutative orientation control. Several multi-layer geometries were designed, fabricated, tested and refined. In this process, micro-adhesion of multiple SU-8 layers was also studied. A method for depositing nickel via electroless plating was also developed, tested and characterized. While no microrobots were shown to produce rotation, the final results included beams that were capable of magnetically-induced vibration when subjected to an AC magnetic field. These samples were characterized to determine resonant frequency of the individual beams.

Digital Object Identifier (DOI)

https://doi.org/10.13023/etd.2020.472

Funding Information

This material is based upon work supported by the National Science Foundation under Grant No. CMMI-1538782. Funding was provided from Fall 2017 through Spring 2019.

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