Year of Publication

2020

Degree Name

Master of Science in Mechanical Engineering (MSME)

Document Type

Master's Thesis

College

Engineering

Department

Mechanical Engineering

First Advisor

Dr. Christine Trinkle

Abstract

This thesis describes a novel method designed to pattern high aspect ratio metallic microscale features using a modified photolithography and electroless nickel plating process. This method utilizes modified photolithography techniques to create a polymer mold that is used to control the location of metal deposition on substrate during electroless nickel plating. In order to generate high aspect ratio mold features, a multiple spin-step process was developed to deposit thick layers of SU-8 photoresist, and inclined lithography was also used to generate tapered sidewalls that could help aid mold removal after plating. Results from electroplating experiments were evaluated using a Zygo interferometer and cast PDMS mold cross-sections to determine plating thickness and uniformity.

Digital Object Identifier (DOI)

https://doi.org/10.13023/etd.2020.457

Funding Information

Funding awarded by project sponsor Tema Isenmann from 2016-2017.

Share

COinS