Year of Publication

2020

Degree Name

Master of Science in Mechanical Engineering (MSME)

Document Type

Master's Thesis

College

Engineering

Department/School/Program

Mechanical Engineering

First Advisor

Dr. Christine Trinkle

Abstract

This thesis describes a novel method designed to pattern high aspect ratio metallic microscale features using a modified photolithography and electroless nickel plating process. This method utilizes modified photolithography techniques to create a polymer mold that is used to control the location of metal deposition on substrate during electroless nickel plating. In order to generate high aspect ratio mold features, a multiple spin-step process was developed to deposit thick layers of SU-8 photoresist, and inclined lithography was also used to generate tapered sidewalls that could help aid mold removal after plating. Results from electroplating experiments were evaluated using a Zygo interferometer and cast PDMS mold cross-sections to determine plating thickness and uniformity.

Digital Object Identifier (DOI)

https://doi.org/10.13023/etd.2020.457

Funding Information

Funding awarded by project sponsor Tema Isenmann from 2016-2017.

Share

COinS