Year of Publication


Degree Name

Doctor of Philosophy (PhD)

Document Type





Mechanical Engineering

First Advisor

Dr. Kozo Saito


A small-scale model of a CVD reactor was built. Axial and radial of major species concentrations and temperature profiles were obtained with a micro gas chromatograph and a fine thermocouple. Those temperature and species concentrations revealed detailed thermal and chemical structures of the CVD reactor.

The concentrations of argon plus hydrogen, methane, and C2Hx (C2H2 + C2H4 + C2H6) resulting from xylene decomposition were measured along the CVD at different temperatures. Ferrocene was added to xylene to investigate the effect of a catalyst on composition profiles. The results with ferrocene indicated an increase in CH4 and C2Hx concentrations. At 1000 C and above, the increase of C2Hx concentration is higher than that for CH4. The effect of ferrocene was very minor on the concentration of the gases. Finally composition and temperature profiles were measured and plotted for the radial direction at X=75 cm and T=1200 C.

The overall rate constant for the gas-phase reaction was calculated based on the measured species concentration data using the Benson and Shaw reaction mechanism. Our study showed that the Benson and Shaw mechanism could be used in the temperature range lower than 800 C.

Also the effect of hydrogen in the syntheses of CNTs, in the CVD reactor using xylene and ferrocene, was studied. Both single-step and two-step methods were applied. In the single-step method, the ferrocene was dissolved in the xylene. In the two step-method the catalyst preparation step was performed first; ferrocene powder was placed in the preheater for a certain period of time and carried by a mixture of argon and hydrogen at fixed concentration to get catalyst nanoparticles deposited on the reactor wall. Xylene then was injected to the reactor. To study the effect of hydrogen, the synthesized materials were observed by SEM and TEM. The results showed that the presence of hydrogen is essential for CNTs to be synthesized by the CVD method, and also the concentration of hydrogen in the reactor has a great effect on the quality of CNTs. The yield of CNTs in the two-step method was slightly higher than that in the one-step method.