Year of Publication

2011

Degree Name

Master of Science in Electrical Engineering (MSEE)

Document Type

Thesis

College

Engineering

Department

Electrical Engineering

First Advisor

Dr. Vijay P Singh

Abstract

Growth confinement techniques for multi walled carbon nanotubes on Au/SiO2 surfaces was studied and incorporated into a gas sensor design. A device framework was conceived and a sensor was built to achieve this structure. The fabrication results were analyzed using scanning electron microscopy which confirmed the achievement of highly site-selective growth of carbon nanotubes, exclusively between the interdigitated electrodes. The sensor was then evaluated for its capacitance and conductance response when exposed to NO2 gas. Variation in sensitivities with frequency and flow rate were analyzed. A mathematical model was derived for such a device structure and the predictions of the model were compared with experimental results.

Share

COinS