NANOSTRUCTURED THIN FILMS AND TUBES OF TITANIA FOR ROOM TEMPERATURE SENSING OF GASES

Author

Satish Kumar Kandala, University of Kentucky

Date Available

12-7-2011

Year of Publication

2008

Degree Name

Master of Science in Electrical Engineering (MSEE)

Document Type

Thesis

College

Engineering

Department

Electrical Engineering

First Advisor

Dr. Vijay P.Singh

Abstract

The main objective of this work was to study the applicability of Nano porous/Nanocrystalline TiO₂ films for serving the growing demand for fast accurate and low cost air quality analysis techniques. The sensitivity of response to variations in microstructure pointed the way to obtain controlled, reproducible and regular microstructures with critical dimensions proportionate with the Debye- length of the oxide. This work aimed to study the sensor properties of thin films of Nanocrystalline Titania and Titania nanotubes at room temperature. Nano porous/Nanocrystalline TiO₂ films were fabricated through evaporation driven convection/sol-gel method by controlling the process conditions. We also fabricated ordered TiO₂ nanotube arrays by carefully controlling the anodization conditions. TiO₂ nanotube arrays were fabricated through potentiostatic anodization of a Ti metal sheet in various electrolyte mediums. The electrolyte mediums consisted of mixtures of acids ranging from HF, HCl, HNO₃, H₂SO₄, H₃PO₄ and CH₃COOH and polar organic solvents like C₂H₆OS(DMSO) and C₂H₄(OH)₂(Ethylene Glycol) . Well ordered films consisting of TiO₂ nanotube arrays (25 μm to 250 μm in length) were obtained. Contacts were deposited on to the annealed samples. Capacitive gas sensors were fabricated and their response to ammonia gas was evaluated.

Recommended Citation

Kandala, Satish Kumar, "NANOSTRUCTURED THIN FILMS AND TUBES OF TITANIA FOR ROOM TEMPERATURE SENSING OF GASES" (2008). University of Kentucky Master's Theses. 574.
https://uknowledge.uky.edu/gradschool_theses/574